Around 370 have left Arsal for Syrian territory under an agreement reached between Lebanon's General Security and Syrian authorities.
According to the United Nations refugee agency, Arsal hosts some 36,000 displaced Syrians, many of them from Syrian villages just across the border.
Women and young children could be seen climbing into cars, tractors, and covered lorries in the dusty suburb of Wadi Hmeid just outside Arsal.
As fighting fronts in some parts of Syria have died down, Lebanese authorities have become increasingly insistent on returns, more of which are expected in the coming weeks.
ISIS started a campaign of terror against Syria and Iraq in 2013 and 2014, respectively.
It, however, lost all of its strongholds in both countries last year thanks to counter-terrorism offensives of the Iraqi and Syrian national armies, backed by their allies.